Quantum interferometric optical lithography: exploiting entanglement to beat the diffraction limit

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Binary Optical Communication with Squeezed - State Light

Optical communi­ cation with two-photon coherent states—part II: photoemissive detection and structured receiver performance, " IEEE Trans. • For squeezed-state interferometry: – C.M. Caves, " Quantum-mechanical noise in an interferometer, " Phys. Rev. Squeezed states in phase sensing inter­ ferometers, " Phys. Quantum interferometric optical lithography: exploiting entanglement to beat the dif...

6.453 Quantum Optical Communication Reading 23

Reading: • For binary optical communication with squeezed-state light: – J.H. Shapiro, H.P. Yuen, and J.A. Machado Mata, “Optical communication with two-photon coherent states—Part II: photoemissive detection and structured receiver performance,” IEEE Trans. Inform. Theory, IT25, 179 (1979) • For squeezed-state interferometry: – C.M. Caves, “Quantum-mechanical noise in an interferometer,” Phys....

Quantum-interferometric optical lithography: Towards arbitrary two-dimensional patterns

Optical lithography is a widely used printing method. In this process, light is used to etch a substrate. The exposed or unexposed areas on the substrate then define the pattern. In particular, the microchip industry uses lithography to produce smaller and smaller processors. However, classical optical lithography can only achieve a resolution comparable to the wave length of the light used @1–...

Quantum imaging beyond the diffraction limit by optical centroid measurements.

I propose a quantum imaging method that can beat the Rayleigh-Abbe diffraction limit and achieve de Broglie resolution without requiring a multiphoton absorber or coincidence detection. Using the same nonclassical states of light as those for quantum lithography, the proposed method requires only optical intensity measurements, followed by image postprocessing, to produce the same complex quant...